JPS60132832A - 基板搬送装置 - Google Patents

基板搬送装置

Info

Publication number
JPS60132832A
JPS60132832A JP58240602A JP24060283A JPS60132832A JP S60132832 A JPS60132832 A JP S60132832A JP 58240602 A JP58240602 A JP 58240602A JP 24060283 A JP24060283 A JP 24060283A JP S60132832 A JPS60132832 A JP S60132832A
Authority
JP
Japan
Prior art keywords
station
magazine
work station
base plate
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58240602A
Other languages
English (en)
Japanese (ja)
Other versions
JPH055735B2 (en]
Inventor
Toshiyuki Furusawa
古沢　敏行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Tokico Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokico Ltd filed Critical Tokico Ltd
Priority to JP58240602A priority Critical patent/JPS60132832A/ja
Publication of JPS60132832A publication Critical patent/JPS60132832A/ja
Publication of JPH055735B2 publication Critical patent/JPH055735B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G60/00—Simultaneously or alternatively stacking and de-stacking of articles

Landscapes

  • Special Conveying (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Stacking Of Articles And Auxiliary Devices (AREA)
  • Supply And Installment Of Electrical Components (AREA)
JP58240602A 1983-12-20 1983-12-20 基板搬送装置 Granted JPS60132832A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58240602A JPS60132832A (ja) 1983-12-20 1983-12-20 基板搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58240602A JPS60132832A (ja) 1983-12-20 1983-12-20 基板搬送装置

Publications (2)

Publication Number Publication Date
JPS60132832A true JPS60132832A (ja) 1985-07-15
JPH055735B2 JPH055735B2 (en]) 1993-01-25

Family

ID=17061929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58240602A Granted JPS60132832A (ja) 1983-12-20 1983-12-20 基板搬送装置

Country Status (1)

Country Link
JP (1) JPS60132832A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100919019B1 (ko) * 2002-12-13 2009-09-24 주식회사 포스코 미니밀 칼슘와이어케이지 자동보충장치

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54120088U (en]) * 1978-02-13 1979-08-22
JPS5681402A (en) * 1979-11-12 1981-07-03 Shinkawa Ltd Apparatus for feeding and carrying-out of sample
JPS57191727U (en]) * 1981-05-29 1982-12-04

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54120088U (en]) * 1978-02-13 1979-08-22
JPS5681402A (en) * 1979-11-12 1981-07-03 Shinkawa Ltd Apparatus for feeding and carrying-out of sample
JPS57191727U (en]) * 1981-05-29 1982-12-04

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100919019B1 (ko) * 2002-12-13 2009-09-24 주식회사 포스코 미니밀 칼슘와이어케이지 자동보충장치

Also Published As

Publication number Publication date
JPH055735B2 (en]) 1993-01-25

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